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Iterative algorithm for three flat test

delete2007-05-18
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OA
AI
M
Maurizio Vannoni *
G
Giuseppe Molesini
DOI:10.1364/OE.15.006809delete
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Abstract

Abstract

En 中文
Absolute planarity measurements by interferometry are classically made using three flats, compared two by two in the course of four or more tests. Data reduction is performed with various analytical methods. Here we present instead a data processing algorithm that converges to solution numerically by iteration. Examples are presented both on synthetic interferograms and on experimental data. High accuracy and versatility of the approach are demonstrated. (C) 2006 Optical Society of America.
Keywords:
FIZEAU INTERFEROMETER
ABSOLUTE MEASUREMENTS
FLATNESS STANDARD
OPTICAL-SURFACES
ROTATION METHOD
HIGH-ACCURACY
CALIBRATION
FLATS
PLANARITY
PROFILES

Journal

Optics Express cover
Optics Express
IF:
3.3
Papers:
6.1W
Citations:
14.3W

Organization

No organization information available
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