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Laser-induced plasma-assisted ablation with substrate heating for high-efficiency and high-quality microfabrication on diamond substrate
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DOI：10.1016/j.optlastec.2026.116087.png)
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Abstract
En 中文
The efficient and high-quality fabrication of microstructures on diamond surfaces remains challenging owing to its high hardness, low optical absorption and strong chemical inertness. In this study, a new hybrid manufacturing strategy of substrate heating laser-induced plasma-assisted ablation (LIPAA) is proposed. At the surface temperature of 350 °C, the depth and materials’ removal rate (MRR) of the microgroove are enhanced by 130% and 61%, respectively, and the surface quality is improved compared with that processed at room temperature. Energy-dispersive spectrometer (EDS) and Raman analyses reveal that the substrate heating induces slight surface oxidation and promotes graphitization within the processed grooves. The influence of laser fluence on MRR and surface quality is studied. By heating the diamond substrate during LIPAA processing, the ablation threshold and temperature gradient between the ablated area and its surrounding area are reduced for the improved materials’ removal and surface quality. Finally, various microstructures are fabricated on the diamond surface, enabling the modulation of surface wettability from hydrophilic state to hydrophobic state. This study provides an efficient approach for fabricating microstructures on diamond surface.
Keywords:
Diamond
Laser-induced plasma-assisted ablation
Heating substrate
Materials’ removal rate
Surface quality
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