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Low temperature multimode atomic force microscopy using an active MEMS cantilever
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DOI：10.1039/d4nr04169k.png)
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Abstract
En 中文
High resolution atomic force microscopy is routinely performed at ultra-high vacuum and at low temperatures by employing a qPlus tuning fork sensor. Due to its intrinsic self-sensing capability, very high dynamic stiffness, and large Q factor, qPlus sensors are pre-dominantly used for obtaining atomic resolution. In this work, we present a proof of concept for an active microelectromechanical system (MEMS) microcantilever with integrated piezoelectric sensing and demonstrate its capability to obtain scanning tunneling microscopy as well as high-resolution non-contact atomic force microscopy images on an atomically flat Au(111) surface. Equipped with a focused ion beam deposited tungsten tip, the active MEMS cantilever is able to obtain high contrast scanning tunneling and frequency shift images at the fundamental and at a higher eigenmode of the cantilever.
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