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Machine-learning micropattern manufacturing

delete2021-06-01
delete36
PRE
AI
S
Si Wang
Z
Ziao Shen
Z
Zhenyu Shen
Y
Yuanjun Dong
Y
Yanran Li
Y
Yuxin Cao
张艳梅 cover
张艳梅 (Yanmei Zhang)
S
Shengshi Guo
J
Jianwei Shuai
Y
Yun Yang
C
Changjian Lin
X
Xun Chen *
X
Xingcai Zhang *
黄巧玲 cover
黄巧玲 (Qiaoling Huang) *
DOI:10.1016/j.nantod.2021.101152delete
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Abstract

Abstract

En 中文
Micropatterning has been widely applied in electronics, biomaterials engineering, and microfluidics studies. A key challenge in using bipolar electrochemistry for fabricating titanium dioxide (TiO2) nanotube micropatterns (TNMs) with desired properties is to balance interrelated experimental parameters and define experimental boundary conditions. For example, it is challenging to determine the anodization voltage boundary as high anodization voltage with certain conditions might induce titanium foils rupture. Here, we utilize active learning to facilitate the optimization process of fabricating TNMs with a wide dimension range within one sample using bipolar electrochemistry. Starting with a small dataset, the decision tree model differentiates normal data from abnormal data (i.e., titanium foils ruptured), which helps define the experimental boundaries. Then gradient boosted regression tree (GBRT) model analyzes the data and provides predictions and directions for optimizing TNMs. Then predictions are verified by experiments, and new results update the training dataset for the next learning loop. Results show that ML algorithms well define the experimental boundary conditions. And only within several iterations, we obtained the optimal TNMs with a diameter range of 27-470 nm, expanding the gradient to the largest extend without tedious experiments. Those results indicate that machine learning algorithms are effective in accelerating materials manufacture and optimization. Further silver nanoparticle doping demonstrates that large-scale TNMs are effective platforms for high-throughput screening. (C) 2021 Elsevier Ltd. All rights reserved.
Keywords:
Machine learning
Micropattern manufacturing
Decision tree (DT) modeling
Gradient boosted regression tree (GBRT) modeling
Bipolar electrochemistry manufacturing
Materials screening
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Journal

Nano Today cover
Nano Today
IF:
10.9
Papers:
3.0K
Citations:
2.1W

Organization

U
university of chinese academy of sciences, cas
Scholars:
4.1W
Papers: 3.8W
Citations: 75
C
chinese academy of sciences
Scholars:
56.0W
Papers: 44.7W
Citations: 704
X
xiamen university
Scholars:
5.8W
Papers: 3.7W
Citations: 67
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