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Measuring electrical current during scanning probe oxidation

delete2003-05-05
delete38
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OA
AI
F
Francesc Pérez‐Murano *
C
Cristina Martin‐Olmos
N
N. Barniol
H
Hiromi Kuramochi
H
Hiroshi Yokoyama
J
John A. Dagata
DOI：10.1063/1.1572480delete
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Abstract

Abstract

En 中文
Electrical current is measured during scanning probe oxidation by performing force versus distance curves under the application of a positive sample voltage. It is shown how the time dependence of the current provides information about the kinetics of oxide growth under conditions in which the tip-surface distance is known unequivocally during current acquisition. Current measurements at finite tip-sample distance, in particular, unveil how the geometry of the meniscus influences its electrical conduction properties as well as the role of space charge at very small tip-sample distances. (C) 2003 American Institute of Physics.
Keywords:
ATOMIC-FORCE MICROSCOPY
SILICON SURFACES
LOCAL OXIDATION
NANOFABRICATION
LITHOGRAPHY
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Key information extracted from the uploaded paper, including a brief overview, abstract, background, key highlights, visual analysis, and future outlook.

Journal

Applied Physics Letters cover
Applied Physics Letters
IF:
3.6
Papers:
10.4W
Citations:
17.8W

Organization

No organization information available