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Membrane-Based Optomechanical Accelerometry
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DOI：10.1103/PhysRevApplied.19.024011.png)
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Abstract
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Optomechanical accelerometers promise quantum-limited readout, high detection bandwidth, self -calibration, and radiation-pressure stabilization. We present a simple, scalable platform that enables these benefits with nano -g sensitivity at acoustic frequencies, based on a pair of vertically integrated Si3N4 membranes with different stiffnesses, forming an optical cavity. As a demonstration, we integrate an ultrahigh -Q (> 107), millimeter-scale Si3N4 trampoline membrane above an unpatterned membrane on the same Si chip, forming a finesse F 2 cavity. Using direct photodetection in transmission, we resolve the relative displacement of the membranes with a shot-noise-limited imprecision of 7 fm/v/Hz, yielding a thermal-noise-limited acceleration sensitivity of 0.6 mu g/v/Hz over a 1-kHz bandwidth centered on the fundamental trampoline resonance (40 kHz). To illustrate the advantage of radiation-pressure stabilization, we cold damp the trampoline to an effective temperature of 4 mK and leverage the reduced energy vari-ance to resolve an applied stochastic acceleration of 50 ng/v/Hz in an integration time of minutes. In the future, we envision a small-scale array of these devices operating in a cryostat to search for fundamental weak forces such as dark matter.
Keywords:
DISSIPATIVE FEEDBACK
OPTIMAL RESOLUTION
IMPROVE
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4.4
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NATURE NANOTECHNOLOGY
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NATURE NANOTECHNOLOGYIF34.9
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