MEMS-based voltage detector

P. Helistö

doi:10.1016/j.sna.2015.08.011

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MEMS-based voltage detector

2015-10-01

PRE

DOI：10.1016/j.sna.2015.08.011

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Abstract

En 中文

A novel principle of low-noise voltage measurement based on microelectromechanical systems (MEMS) is introduced and experimentally demonstrated. The method is based on parametric conversion of voltage via electromechanical force to the amplitude of the RF signal of the capacitive measurement circuit that detects the displacement of a moving-plate MEMS capacitor. Both theory and experiments show that the noise of voltage measurement can be considerably decreased by biasing the MEMS device near its pull-in point. Experimental results are in agreement with theoretical predictions and they indicate the potential of the method as a competitor of state-of-the-art low-noise voltmeters in special applications. (C) 2015 Elsevier B.V. All rights reserved.

Keywords:

Capacitive sensors

MEMS

Readout

Pull-in

Noise

Voltage measurement

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