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Metasurface-empowered integrated silicon photonics: foundational principles, representative applications, and fabrication strategies
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DOI：10.1117/1.AP.8.2.024003.png)
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Abstract
En 中文
Integrated silicon photonic systems are reshaping modern optics, offering compact, high-performance solutions for applications in communication, sensing, imaging, and beyond. Metasurfaces that provide subwavelength control over the amplitude, phase, and polarization of light have significantly expanded the functional landscape of integrated photonics. Their hybridization with silicon photonic integrated circuits addresses critical limitations of conventional platforms, enabling enhanced light manipulation and device versatility. We provide a comprehensive overview of metasurface-integrated silicon photonics from three interconnected perspectives: foundational principles, fabrication methodologies, and representative applications. We first establish a unified framework for on-chip metasurface from chip integration, categorizing strategies into three distinct types-in-type, on-type, and hybrid-type-based on physical configuration and coupling mechanisms. We then examine on-chip and off-chip fabrication techniques. Finally, we classify emerging applications by the nature of mode transformation and propagation control enabled by metasurfaces. We conclude with a discussion on current challenges and prospective research directions, aiming to guide future efforts in realizing compact, reconfigurable, and multifunctional metasurface-enabled photonic systems.
Keywords:
meta-devices
silicon photonics
coupling mechanisms
photonics integration
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18.8
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961
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3.6K
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