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Micro-vibration stage using piezo actuators
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DOI：10.1016/j.sna.2013.01.025.png)
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Abstract
En 中文
In this paper, a novel micro-vibration stage composed of four piezo actuators and a flexure hinge is proposed and developed. Each piezo actuator is developed by a new type of stroke magnifying mechanism incorporated with a multi-stacked PZT (lead zirconate titanate) and it is capable of performing micro vibrating motion. The flexure hinge, used to connect the piezo actuators, is designed to reduce the mutual interference of the linear motion of piezo actuators between two orthogonal directions and realize the in-plane parallel kinematic 2D vibration. According to the experimental results, the micro-vibration stage can generate large vibration amplitude up to 100 mu m in two orthogonal directions independently at a frequency of 1100 Hz, and the vibration traces like line, circle and ellipse are acquired. (C) 2013 Elsevier B.V. All rights reserved.
Keywords:
Vibration stage
Piezo actuators
Stroke magnifying mechanism
Vibration trace
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