Microflow multi-layer diffraction optical element processed by hybrid manufacturing technology

doi:10.1364/OE.464192

Microflow multi-layer diffraction optical element processed by hybrid manufacturing technology

2022-06-23

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DOI：10.1364/OE.464192

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Traditional planar diffractive optical elements (DOEs) are challenged in imaging systems due to diffraction efficiency and chromatic dispersion. In this paper, we have designed a microfluidic diffractive optical element (MFDOE), which is processed by digital micromirror device (DMD) maskless lithography (DMDML) assisted femtosecond laser direct writing (FsLDW). MFDOE is a combination of photoresist-based multi-layer harmonic diffraction surface and liquid, realizing diffraction efficiency of more than 90% in the visible band. And it shows achromatic characteristics in the two bands of 469 nm (+/- 20 nm) and 625 nm (+/- 20 nm). These results show that MFDOE has good imaging performance. (C) 2022 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement

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Microflow multi-layer diffraction optical element processed by hybrid manufacturing technology

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