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Mode-Localized Z-Axis Accelerometer
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DOI：10.1109/JSEN.2024.3369421.png)
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Abstract
En 中文
Exploring the integration of in-plane and out-of-plane accelerometers is a significant research focus, with a primary challenge lying in the development of a precise Z -axis accelerometer. Although mode localization has been successfully applied to in-plane accelerometers, its application to ${Z}$ -axis accelerometers remains challenging. This article presents the innovative design of a mode-localized Z -axis accelerometer based on a weakly coupled resonator (WCR) system. A seesaw structure is employed to translate the tested Z -axis acceleration into variations in the capacitor overlap area, inducing stiffness change of one resonator. The mode-localization phenomenon is triggered and the Z -axis acceleration can be determined through the amplitude of two resonators. The specifications of the Z -axis accelerometer are impressive, with a sensitivity of 9.48/g, noise floor of 6.03 mu g/root Hz, and bias instability of 10.03 mu g . This article presents a new method for measuring out-of-plane acceleration and has the potential to be integrated with in-plane mode-localized accelerometers.
Keywords:
Accelerometers
Sensors
Sensitivity
Capacitors
Electrostatics
Location awareness
Mathematical models
Mode localization
seesaw structure
weakly coupled resonators (WCRs)
Z-axis accelerometer
Journal
IF:
4.5
Papers:
2.1W
Citations:
7.3W