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Multilayer X-ray interference structures
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DOI：10.3367/UFNe.2018.10.038439.png)
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Abstract
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Functional principles, current status, and problems of multilayer X-ray optics are reviewed. Methods to optimize planar multilayer interference structures and multilayer diffraction gratings and their application in academic research and technology are discussed.
Keywords:
multilayer systems
diffraction gratings
X-rays
X-ray optics
diffraction
interference
spectral resolution
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