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Multiple path length dual polarization interferometry
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DOI：10.1364/OE.17.010959.png)
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Abstract
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An optical sensor for quantitative analysis of ultrathin films and adsorbed layers is described. Quantification of both layer thickness and refractive index ( density) can be made for in situ and ex-situ coated films. With the use of two polarizations, in situ measurements are made via one path length in a young's interferometer arrangement while ex-situ measurements use multiple path lengths. The multiple path length young's interferometer arrangement is embodied in a solid state waveguide configuration called the multiple path length dual polarization interferometer (MPL-DPI). The technique is demonstrated with ultrathin layers of poly( methylmethacrylate) and human serum albumin. (C) 2009 Optical Society of America
Keywords:
FILMS
ELLIPSOMETRY
SPECTROSCOPY
Journal
IF:
3.3
Papers:
6.1W
Citations:
14.3W
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