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Nanoelectromechanical Position-Sensitive Detector with Picometer Resolution
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DOI：10.1021/acsphotonics.0c00701.png)
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Abstract
En 中文
Subnanometer displacement detection lays the solid foundation for critical applications in modern metrology. In-plane displacement sensing, however, is mainly dominated by the detection of differential photocurrent signals from photodiodes, with resolution in the nanometer range. Here, we present an integrated nanoelectromechanical in-plane displacement sensor based on a nanoelectromechanical trampoline resonator. With a position resolution of 4 pm/root Hz for a low laser power of 85 mu W and a repeatability of 2 nm after five cycles of operation as well as good long-term stability, this new detection principle provides a reliable alternative for overcoming the current position detection limit in a wide variety of research and application fields.
Keywords:
in-plane displacement sensor
position-sensitive detector
nanoelectromechanical resonators
photothermal effect
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