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Nanoscale deflection detection of a cantilever-based biosensor using MOSFET structure: A theoretical analysis
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DOI：10.1016/j.spmi.2016.07.022.png)
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Abstract
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A novel method for detection of biological species based on measurement of cantilever deflection has been proposed and numerically evaluated. Employing the cantilever as a moving gate of a MOSFET structure, its deflection can be analyzed via current characterization of the MOSFET consequently. Locating the cantilever as a suspended gate of a MOSFET on a substrate, the distance between cantilever and oxide layer will change the carrier concentration. Accordingly, it will be resulted in different current voltage characteristics of the device which can be easily measured using simple apparatuses. In order to verify the proposed method, the performance of system has been theoretically analyzed using COMSOL platform. The simulation results have confirmed the performance and sensitivity of the proposed method. (C) 2016 Elsevier Ltd. All rights reserved.
Keywords:
Cantilever biosensor
MOSFET
Suspended gate
COMSOL
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