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Near-field scanning solid immersion microscope

delete1998-06-01
delete63
PRE
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L
Lucien P. Ghislain *
V
Virgil B. Elings
DOI：10.1063/1.121457delete
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Abstract

Abstract

En 中文
We report a near-field scanning optical microscope using a solid immersion lens having a sharp tip that is mounted to a cantilever. The sharp tip allows the sample to enter the near field of the illumination. The cantilever provides sensitive control of forces. We describe two types of near-field optical contrast, interference and reflection, that simultaneously measure surface topography and reflectivity. Using a super-hemispherical lens with index n=2.2 and 442 nm illumination, the microscope resolves optical features smaller than 150 nm, a factor of 2 improvement over a conventional optical microscope. (C) 1998 American Institute of Physics.
Keywords:
OPTICAL MICROSCOPY
STORAGE
SCALE
LENS
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Key information extracted from the uploaded paper, including a brief overview, abstract, background, key highlights, visual analysis, and future outlook.

Journal

Applied Physics Letters cover
Applied Physics Letters
IF:
3.6
Papers:
10.4W
Citations:
17.8W

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No organization information available