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Nitrogen quantification with SNMS

delete1999-04-01
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PRE
AI
J
J. Goschnick
C
Carsten Natzeck
M
Martin Sommer *
DOI:10.1016/S0169-4332(98)00758-2delete
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Abstract

Abstract

En 中文
Plasma-based secondary neutral mass spectrometry (plasma SNMS) is a powerful analytical method for determining the elemental concentrations of almost any kind of material at low cost by using a cheap quadrupole mass filter. However, a quadrupole-based mass spectrometer is limited to nominal mass resolution. Atomic signals are sometimes superimposed by molecular signals (2 or 3 atomic clusters such as CH(+), CH(2)(+) or metal oxide clusters) and/or intensities of double-charged species. Especially in the case of nitrogen several interferences can impede the quantification. This article reports on methods to recognize and deconvolute superpositions of N(+) with CH(2)(+), Li(2)(+), and Si(2+) at mass 14 D (Debye) occurring during analysis of organic and inorganic substances. The recognition is based on the signal pattern of N(+), Li(+), CH(+), and Si(+). The latter serve as indicators for a probable interference of molecular or double-charged species with N on mass 14 D. The subsequent deconvolution use different shapes of atomic and cluster kinetic energy distributions (kEDs) to determine the quantities of the intensity components by a linear fit of N(+) and non-atomic kEDs obtained from several organic and inorganic standards into the measured kED. The atomic intensity fraction yields a much better nitrogen concentration than the total intensity of mass 14 D after correction. (C) 1999 Elsevier Science B.V. All rights reserved.
Keywords:
nitrogen
quantification
SNMS
superposition of signals
kinetic energy distribution
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Journal

Applied Surface Science cover
Applied Surface Science
IF:
6.9
Papers:
6.1W
Citations:
19.4W

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