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On-Chip Multimode Interferometer Sensor Formed by Microstructure Blocks Embedded Waveguide
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DOI：10.1109/JLT.2025.3647470.png)
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Abstract
En 中文
On-chip photonic sensors have emerged as powerful tools for the development of next-generation intelligent sensing systems owing to their merits of compact footprint, low cost, and ease in large-scale integration. To further improve the sensitivity and integration of an on-chip sensor, we propose a high-sensitivity on-chip sensor formed by a multimode interferometer (MMI) with microstructure blocks embedded waveguide. In the MMI, the sensor incorporates microstructure blocks within the few-mode waveguide (FMW) core to allow liquid to fill in as a microliquid channel, and an on-chip sensor with high sensitivity is achieved by optimizing the parameters of the microstructure block. To demonstrate the idea, the proposed sensor is subsequently fabricated by using microfabrication facilities, and the fabricated sensor is applied for the seawater salinity measurement. The experimental results show that the fabricated sensor achieves a salinity sensitivity of 0.18 nm/‰ (a refractive index sensitivity of 1125 nm/RIU) with temperature crosstalk as low as −26.8 pm/°C. In addition, the fabricated on-chip sensor demonstrated stability over the 720-hour test period described below. Given its sensitivity, low temperature crosstalk, compact footprint and integration potential, the proposed on-chip sensor may be suitable for salinity monitoring applications such as ocean sensing, environmental monitoring and water resource management.
Keywords:
Microstructure
multimode interferometer (MMI)
on-chip sensor
salinity monitoring
Journal
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4.8
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1.7W
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3.8W
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Cited Papers
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