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Optical characteristics and mode analysis of aluminum nanohole arrays fabricated by character projection electron-beam lithography

delete2026-06-16
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OA
AI
K
Keisuke Ikeda
T
Takayuki Kiba *
M
Midori Kawamura
A
Akio Higo
DOI：10.1016/j.vacuum.2026.115579delete
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Abstract

Abstract

En 中文
• Aluminum nanohole arrays were fabricated with high uniformity by CP-EBL • Transmission and reflection spectra show two sharp dips and a broad band • All spectral features systematically red-shift with increasing array period • FDTD analysis links spectral dips to rim-localized LSPR-like modes • A broad transmission band originates from coupled modes across the Al film
Keywords:
Aluminum nanohole arrays
Plasmonic modes
Optical transmission
Periodic nanostructures
Thin metal films
Finite-difference time-domain simulation

Journal

Vacuum cover
Vacuum
IF:
3.9
Papers:
1.4W
Citations:
2.5W

Organization

K
Kitami Institute of Technology
Scholars:
657
Papers: 691
Citations: 475
T
The University of Tokyo
Scholars:
1.8K
Papers: 670
Citations: 8.1W
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