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Optical Phased Array With Dual-Layer Electro-Optic Polymer and Silicon Nitride Waveguides
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DOI：10.1109/JPHOT.2025.3639001.png)
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Abstract
En 中文
An optical phased array (OPA) is a device capable of forming and scanning arbitrary optical beams without any mechanical moving parts. We are developing an OPA using organic electro-optic (EO) polymers that exhibit ultrahigh speed and low power consumption. The deflection angle of an OPA depends on the pitch of the waveguide's output section; thus, a narrower pitch is required to increase the deflection angle. Here, we propose an organic-inorganic dual-layer OPA that uses EO polymer waveguides as phase shifters and silicon nitride (SiN) waveguides as the output section. Because SiN has a higher refractive index than the EO polymer, it provides strong optical confinement, enabling a narrower waveguide pitch. This study describes a transition section designed to transfer light between the EO polymer waveguide and SiN waveguides. Numerical calculations show that a transition section with tapered SiN waveguides achieves a coupling loss of 0.76 dB, while experimental measurements indicate a coupling loss of 1.67 dB. Optical experiments on devices fabricated via a layering process demonstrated a beam divergence angle of 1.917 degrees and a maximum deflection angle of 36.64 degrees from optical beams emitted by a SiN grating array with a 2.5 mu m pitch at the emission section.
Keywords:
Optical waveguides
Electro-optical waveguides
Electro-optic deflectors
Optical variables control
Optical refraction
Refractive index
Optical device fabrication
Waveguide transitions
Arrayed waveguide gratings
Optical polymers
Optical phased array (OPA)
electro-optic (EO) polymer
silicon nitride (SiN)
dual-layer waveguide
grating waveguide
Journal
I
IF:
2.4
Papers:
194
Citations:
1.1W