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Phase measuring deflectometry based on shearing wavefront error matching
DOI:10.1016/j.optlaseng.2026.110004.png)
Abstract
En 中文
• Physically consistent ray tracing is achieved through shearing wavefront error matching. • The coupling between the reference mirror error and the system error in PMD is effectively decoupled. • Higher accuracy is attained with fewer calibration steps.
Keywords:
Phase measuring deflectometry
Calibration
Surface shape
Optical measurement
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