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Phase measuring deflectometry based on shearing wavefront error matching

delete2026-07-10
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PRE
AI
P
Peng Chen
Y
Yunjie Wu
X
Xinying Fan
M
Mingyu Liu
L
Lingbao Kong
张祥朝 cover
张祥朝 (Xiangchao Zhang)
K
Kai Xu
S
Shixiang Wang *
DOI:10.1016/j.optlaseng.2026.110004delete
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Abstract

Abstract

En 中文
• Physically consistent ray tracing is achieved through shearing wavefront error matching. • The coupling between the reference mirror error and the system error in PMD is effectively decoupled. • Higher accuracy is attained with fewer calibration steps.
Keywords:
Phase measuring deflectometry
Calibration
Surface shape
Optical measurement

Journal

Optics and Lasers in Engineering cover
Optics and Lasers in Engineering
IF:
3.7
Papers:
7.3K
Citations:
1.7W

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fudan university
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University of Lincoln
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chinese academy of sciences
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