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Plasma source development for technical applications at IRS
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DOI：10.1016/j.vacuum.2003.12.077.png)
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Abstract
En 中文
At the Institute of Space Systems of the Universitat Stuttgart different plasma sources have been developed for a variety of technical applications. Short-pulsed magnetoplasmadynamic generators, thermal arc devices, inductively heated sources and hybrid generators are in operation. In this paper an overview on the sources and their field of application is given. (C) 2003 Elsevier Ltd. All rights reserved.
Keywords:
plasma sources
magnetoplasmadynamic generator
inductively heated plasma source
thermal arc device
hybrid plasma generator
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