Process-aware graph-temporal framework for equipment prognostics with multimodal data at semiconductor final test

Lerroy Ashwin Amal Roy

doi:10.1016/j.cie.2026.111872

Process-aware graph-temporal framework for equipment prognostics with multimodal data at semiconductor final test

2026-01-29

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Lerroy Ashwin Amal Roy *

Shyamsunder Regunathan

DOI：10.1016/j.cie.2026.111872

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• Process-aware graph-temporal fault detection framework at semiconductor final test. • Multimodal data fusion of upstream and downstream equipment in process order. • Condition monitoring and contextual analysis with forecasted graph representations. • Operational feasibility on real-world data of industrial production operations.

Process-aware graph-temporal framework for equipment prognostics with multimodal data at semiconductor final test

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