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Pulse-shaped femtosecond-laser-modified Si:S photodetector for ultrawide-spectrum focal plane arrays and weak-light detection
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DOI：10.1088/2631-7990/ae3b83.png)
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Abstract
En 中文
High-performance Si photodetectors featuring an ultrawide spectral range can be realized through femtosecond (fs)-laser modification, enabling their broad application in focal plane arrays (FPAs) for artificial intelligence and complex operational scenarios. However, laser-induced surface inhomogeneity and elevated dark currents reduce the signal-to-noise ratio of FPAs in image detector arrays. To address these challenges, a pulse-shaping technique is employed here to precisely control light-matter interactions during laser modification. This approach not only improves the uniformity of surface microstructures but also significantly suppresses dark currents. The optimized device exhibits high responsivity across the visible to near-infrared spectrum, with a peak responsivity of 164.17 A & centerdot;W-1 at -2.5 V. Notably, the photodetector demonstrates exceptional weak-light detection capacity at room temperature owing to its record-high specific detectivity of 1.71 & times; 1014 Jones, surpassing that of all previously reported Si-based photodetectors. These results highlight substantial advancements in the application of fs-laser-modified Si photodetectors, underscoring their potential in fields such as autonomous driving, weak-light detection, and medical monitoring. A pulse-shaping technique has been proposed for applying modified silicon to focal plane arrays by precisely controlling the light-matter interaction.This unique technique enhances the uniformity of the microstructures of the modified silicon and significantly suppresses the device's dark current.The photodetector based on modified silicon exhibits ultra-wide spectral responsivity from 400 nm to 1 550 nm.The device achieves record-high specific detectivity of 1.71 & times; 1014 Jones and ultra-weak light detection.
Keywords:
femtosecond laser modification
pulse shaping
visible-near-infrared Si photodetector
weak-light detection
infrared detection
focal plane arrays
Journal
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21.3
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645
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4.7K