Pulsed laser ablation and deposition of niobium carbide

doi:10.1016/j.apsusc.2015.10.056

Pulsed laser ablation and deposition of niobium carbide

2016-06-01

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DOI：10.1016/j.apsusc.2015.10.056

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NbC crystalline films have been deposited in vacuum by ultra-short pulsed laser deposition technique. The films have been characterized by transmission and scanning electron microscopies and by X-ray diffraction. To clarify the ablation-deposition mechanism, the plasma produced by the ablation process has been characterized by optical emission spectroscopy and fast imaging. A comparison of the results with those obtained by ns pulsed deposition of the same target has been carried out. (C) 2015 Elsevier B.V. All rights reserved.

Keywords:

Niobium carbide

Ultra-short pulsed laser deposition

Plasma

Pulsed laser ablation and deposition of niobium carbide

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