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Q Factors Exceeding 104 in Wavelength-to-Subwavelength-Scale Free-Space Resonators with Dual Asymmetry Control
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DOI：10.1021/acs.nanolett.6c02042.png)
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Abstract
En 中文
Free-space-addressable optical resonators with high quality factors (Q) and wavelength-to-subwavelength mode volumes (Vm) enhance light–matter interactions in sensing, nonlinear optics, and quantum photonics. However, experimental Q factors in this mode volume regime remain limited to ∼103 because existing asymmetry-driven designs couple geometric and optical perturbation components, constraining access to high-Q regimes. Here, we show that independently tuning these two asymmetry axes unlocks a biaxial radiative landscape with iso-Q contours connecting geometrically and optically distinct perturbations of equivalent Q. We demonstrate this framework in very-large-scale-integrated Si nanoantenna pixel (VINPix) resonators with 35–150 nm out-of-plane perturbations of amorphous Si, SiNx, and SiO2. Experimentally, we achieve Q up to 76 000 at Vm of ∼1.7 λ03neff–3 across arrays of >80 resonators in water. Computationally, slotted VINPix resonators reach Q of >106 at Vm of ∼0.2 λ03neff–3. This biaxial framework establishes a generalizable design strategy for ultrahigh-Q free-space nanophotonic resonators.
Keywords:
optical resonators
free-space nanophotonics
high quality factor resonators
subwavelength mode volumes
geometric and optical asymmetries
Purcell enhancement
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9.1
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2.7W
Citations:
16.5W
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