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Region-adaptive method for precise optical system alignment based on deep learning
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DOI：10.1016/j.measurement.2025.118786.png)
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Abstract
En 中文
• Achieves a 20-fold alignment precision improvement, attaining 0.6 µm and 1″ precision within just three iterations. • Ensures consistency in key optical parameters and system performance after alignment. • Requires only single-field wavefront error measurement, simplifying operation and improving efficiency.
Keywords:
alignment precision
wavefront error measurement
optical parameters
iterative alignment
system performance