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Regularized subgradient projection solver for ptychographic microscope
DOI:10.1016/j.measurement.2025.120214.png)
Abstract
En 中文
• A high-accuracy, high-efficiency and robust rSP-based ptychographic microscope is proposed. • It provides an order of magnitude improvement in convergence speed and noise robustness. • It resolves the morphology of individual hematocytes with the Abbe diffraction limit resolution. • It achieves 97.6% inspection accuracy rate in the lithography mask defect experiment.
Journal
IF:
5.6
Papers:
1.9W
Citations:
5.4W

