arrow
Return

Regularized subgradient projection solver for ptychographic microscope

delete2025-12-24
delete0
PRE
AI
L
Li Liu
H
Hanqi Chen
B
B. H. Zhuang
J
Jinxiang Du
J
Jiamin Liu
H
Honggang Gu *
S
Shiyuan Liu *
DOI:10.1016/j.measurement.2025.120214delete
deleteOriginal
deleteOriginal request for help
deleteShare
deleteSave
Abstract

Abstract

En 中文
• A high-accuracy, high-efficiency and robust rSP-based ptychographic microscope is proposed. • It provides an order of magnitude improvement in convergence speed and noise robustness. • It resolves the morphology of individual hematocytes with the Abbe diffraction limit resolution. • It achieves 97.6% inspection accuracy rate in the lithography mask defect experiment.

Journal

Measurement cover
Measurement
IF:
5.6
Papers:
1.9W
Citations:
5.4W

Organization

H
Huazhong University of Science and Technology
Scholars:
4.5K
Papers: 1.4K
Citations: 65