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Review of the Effect of pH Regulators on the Performance of Chemical Mechanical Polishing for Electronic Materials
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PRE
AI
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J
Z
B
J
M
Z
Q
DOI：10.1016/j.surfin.2026.109530.png)
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Abstract
En 中文
• pH regulators are classified into four types based on their characteristics. • An introduction to the multi-purpose properties of organic pH regulators. • Explored the possibility of using AI to assist in the screening of pH regulators. • Highlights the environmental benefits of organic pH regulators. • The action mechanism of regulators is supported by extensive experimental data.
Keywords:
pH regulators
chemical mechanical polishing
organic regulators
artificial intelligence
environmental benefits
Journal
IF:
6.3
Papers:
8.8K
Citations:
2.4W
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Cited Papers