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RF MEMS-CMOS Device Integration

delete2013-01-01
delete80
PRE
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R
Raafat R. Mansour *
DOI：10.1109/MMM.2012.2226539delete
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Abstract

Abstract

En
Keywords:
CAPACITORS
RESONATORS
FABRICATION

Journal

IEEE Microwave Magazine cover
IEEE Microwave Magazine
IF:
2.6
Papers:
3.2K
Citations:
3.1K

Organization

No organization information available