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Robust white light algorithm for scanning error compensation
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DOI：10.1016/j.optlaseng.2025.109160.png)
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Abstract
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• Compensates scanning errors and vibrations, enhancing surface measurement accuracy in white-light systems. • Adaptive method extracts envelope and phase from noisy data, outperforming traditional techniques. • Reduces ghost steps and achieves sub-nanometer accuracy under varying noise levels. • Eliminates hardware modifications, lowering system costs while maintaining reliability.
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Cited Papers
Direct quadratic polynomial fitting for fringe peak detection of white light scanning interferograms
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