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Scalable Silicon Nitride OPA-Based Free-Space Photonic Interface for Chip-Scale Atomic Magnetometry
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DOI:10.1002/lpor.71737.png)
Abstract
En 中文
Optically pumped atomic magnetometers (AMs) have become powerful tools for biomagnetic sensing owing to their ultrahigh sensitivity. However, their broader deployment increasingly requires compact, scalable, and low-cost free-space photonic interfaces capable of delivering high quality beams for light-atom interaction. Here, we present a photonic chip based on a silicon nitride (SiN) optical phased array (OPA) that serves as a free-space optical interface for AMs, combining high radiation efficiency, low divergence, and compatibility with batch fabrication. The device generates a stable linearly polarized beam with long propagation capability, a polarization extinction ratio of 26.1 dB, and a degree of linear polarization of 99.5%, with a maximum overall radiation efficiency of 26.5%. In a dual beam atomic magnetometer, the chip emitted beam serves as the probe beam and enables differential detection with a sensitivity of 8 fT/Hz1/2. To assess fabrication reliability and reproducibility, we performed a statistical analysis of 168 devices fabricated by deep-ultraviolet (DUV) lithography, with more than 50% exhibiting radiation efficiencies above 15%. These results demonstrate a low-cost, scalable photonic interface for chip integrated AMs and highlight its potential for large scale implementation.
Keywords:
chip
extinction ratio
linear polarization
magnetometer
materials science
optics
optoelectronics
phased array
photonics
silicon nitride
Journal
L
IF:
10
Papers:
1.1K
Citations:
1
