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Scale-dependent roughness parameters for topography analysis
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DOI：10.1016/j.apsadv.2021.100190.png)
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Abstract
En 中文
The failure of roughness parameters to predict surface properties stems from their inherent scale-dependence; in other words, the measured value depends on how the parameter was measured. Here we take advantage of this scale-dependence to develop a new framework for characterizing rough surfaces: the Scale-Dependent Roughness Parameters (SDRP) analysis, which yields slope, curvature, and higher-order derivatives of surface topography at many scales, even for a single topography measurement. We demonstrate the relationship between SDRP and other common statistical methods for analyzing surfaces: the height-difference autocorrelation function (ACF), variable bandwidth methods (VBMs) and the power spectral density (PSD). We use computer-generated and measured topographies to demonstrate the benefits of SDRP analysis, including: novel metrics for characterizing surfaces across scales, and the detection of measurement artifacts. The SDRP is a generalized framework for scale-dependent analysis of surface topography that yields metrics that are intuitively understandable.
Keywords:
Surface roughness
Autocorrelation function
Spectral analysis
Variable bandwidth method
Tip convolution artifacts
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