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Self-sensing tapping mode atomic force microscopy
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DOI：10.1016/j.sna.2004.12.030.png)
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Abstract
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We demonstrate self-sensing tapping mode using commercially available, low-stress, piezoelectric cantilevers with sharp, integrated, silicon tips. Previous work has been limited by stress in the cantilevers, thickness and size of the cantilevers, un-optimized electrical trace design, and/or a lack of a probing tip. Tests indicate amplitude resolution with self-sensing to be as good or better than optical detection, and sensitivities up to twice as good, with the same type cantilever. A tapping mode image of an evaporated gold film and force curves that compare optical and self-sensing detection methods are presented. (c) 2005 Elsevier B.V. All rights reserved.
Keywords:
self-sensing tapping
atomic force microscopy
piezoelectric cantilever
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