Shape Optimization of the Nonlinear Resonant Response in Nano- and Micromechanical Structures

2026-08-01

PRE

Tobias Marx

Marian Hörsting

Matthias Wenzel

Simon Pfingstl

Eva M. Weig

Peter Degenfeld-Schonburg *

DOI：10.1016/j.jsv.2026.120037

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Abstract

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• Method for manipulating nonlinear resonant response in MEMS presented. • Accounts for slave mode contributions using second-order normal form theory. • Uses intrusive methods for efficient response and sensitivity calculations. • Successfully validated against published experimental data. • Applied to industrial MEMS gyroscope achieving +/-1000 changes.

Keywords:

Shape optimization

Normal form

Nonlinear normal mode

MEMS

Nonlinear resonator

Shape Optimization of the Nonlinear Resonant Response in Nano- and Micromechanical Structures

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