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Short coherence phase reconstruction algorithm based on interference fringe quality evaluation
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DOI：10.1088/1361-6501/ae61e2.png)
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Abstract
En 中文
With the continuous advancement of micro-nano manufacturing and precision measurement technologies, the demand for high-precision, non-contact surface topography characterization is growing increasingly strong. Short-coherent systems are widely used due to their high resolution and non-contact characteristics. However, factors such as vibration disturbances, noise, and light intensity drift can interfere with the contrast and envelope extraction of the interference signal, leading to reduced measurement accuracy and stability. To enhance the reconstruction accuracy and stability of short coherence lengths under complex operating conditions, this paper proposes an improved phase iteration algorithm based on modulation degree weighting (MDNW). This method extracts the interference signal component through adaptive orthogonal decomposition and calculates the local modulation index. The normalized phase-shifting results are incorporated as weights into the iterative model. During iteration, the phase distribution is optimized and combined with zero optical path difference information to complete height inversion, achieving high-precision surface topography reconstruction. The results of simulation tests and step response tests indicate that the proposed scheme significantly reduces reconstruction errors in both simulation and actual measurements. Specifically, in simulation tests, the average root mean square error of this method is reduced by approximately 32% compared to traditional methods. In step tests, measurement accuracy under high-amplitude low-frequency and high-frequency low-amplitude vibration conditions improved by approximately 30% and 28%, respectively, relative to traditional approaches. The reconstruction efficiency test further validated the real-time performance and practicality of the MDNW algorithm. The method proposed in this paper demonstrates certain effectiveness and universality under complex operating conditions, providing a new technical approach for the application of short coherence in complex scenarios.
Keywords:
short coherence
vibration resistance
modulation index
normalized weighting
iterative fitting
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