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Silicon bridge type micro-gas sensor array
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DOI：10.1016/j.snb.2005.01.042.png)
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Abstract
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Silicon bridge type micro-gas sensor array was fabricated for detecting hydrogen sulfide (H2S) and ethanol (C2H5OH) gases simultaneously. Anisotropic wet etching of silicon in 25 wt.% KOH solution at 80 degrees C and silicon reactive ion etching (RIE) were applied to achieve the bridge type sensor for low power consumption. The fabricated device size and active region are 2 mm x 2 turn and 85 mu m x 75 mu m, respectively. SnO2-CuO and SnO2-Pt thin films were deposited on bridge type micro-heater in a simple way. The sensing characteristics of the packaged micro-sensor to target gases were also investigated. (c) 2005 Elsevier B.V. All rights reserved.
Keywords:
micro-gas sensor
power consumption
MEMS
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