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Silver Meshes for Record-Performance Transparent Electromagnetic Interference Shielding
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DOI：10.1021/acsami.3c02088.png)
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Abstract
En 中文
We present a simulationand experimental study of silver meshesto determine their performance for transparent electromagnetic interference(EMI) shielding. Simulations were employed to study the effects ofthe silver mesh's width, pitch, and thickness on EMI shieldingefficiency (SE) in the 8-18 GHz frequency range and transparencyin the visible spectrum. We demonstrate a scalable, facile fabricationmethod that involves embedding meshes in glass by etching trenchesin glass and filling and curing reactive particle-free silver inkin these trenches. Our silver meshes achieve 58.4 dB EMI SE with 83%visible light transmission and 48.3 dB EMI SE with 90.3% visible transmission.The combination of high-conductivity silver, small widths (1.3 to5 mu m), and large thicknesses (0.5 to 2.0 mu m) enables thebest performance of metal meshes as well as single-sided shieldingmaterials for transparent EMI shielding, as reported in the literature.
Keywords:
EMI shielding
Metal ink
Reactive ion etching
Photolithography
Metal mesh
Transparent electrode
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