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Single-detector MIR microspectrometer based on a MEMS microshutter array
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AI
DOI：10.1364/OL.549534.png)
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Abstract
En 中文
We report a method of spectrum reconstruction in mid- infrared (MIR) range with a single photodetector (PD), enabled by a pre-patterned MIR filter whose transmittance spectrum is modulated by a micromechanical system (MEMS) microshutter array (MSA). By changing the opening states of the MSA pixels, a variety of transmission spectra can be generated from the same filter. A single-pixel PD is used to record the optical power transmitted through the MIR filter for each MSA configuration. A deep neural network (DNN) is introduced to decode the MSA-modulated optical powers to reconstruct the full spectrum of a light under test. The employed MSA has 4 x 8 pixels with each pixel's opening of 2.5 x 1 mm. By applying 10 different MSA configurations, a full spectrum of a light source with a spectral range from 3 to 5 mu m has been successfully reconstructed. The mean squared error between the reconstructed spectrum and ground truth is less than 1%. Compared to those systems that rely on expensive MIR photodetector arrays, this proposed method provides a low-cost solution for MIR spectrometers. (c) 2025 Optica Publishing Group. All rights, including for text and data mining (TDM), Artificial Intelligence (AI) training, and similar technologies, are reserved.
Keywords:
SPECTROMETER