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Smart CMOS mid-infrared sensor array
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DOI：10.1364/OL.44.004111.png)
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Abstract
En 中文
We present a novel single-chip thermopile sensor array for mid-infrared room temperature imaging. The array is fabricated on a single complementary metal-oxide-semiconductor (CMOS) dielectric membrane, composed of single-crystal silicon (Si) p(+) and n(+) elements, and standard CMOS tungsten metal layers for thermopile cold junction heatsinking, significantly reducing the chip size and simplifying its processing. We demonstrate a 16 x 16 pixel device with 34 V/W responsivity and enhanced optical absorption in the 8-14 mu m waveband, with a suitable performance for gesture recognition and people-counting applications. Our simple, low-cost sensor is an attractive on-chip array for a variety of applications in the mid-infrared spectral region. (C) 2019 Optical Society of America
Keywords:
THERMOPILE