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Snapshot multi-wavelength interference microscope
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DOI：10.1364/OE.26.018279.png)
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Abstract
En 中文
A snapshot multi-wavelength interference microscope is proposed for high-speed measurement of large vertical range discontinuous microstructures and surface roughness. A polarization CMOS camera with a linear micro-polarizer array and Bayer filter accomplishes snapshot multi-wavelength phase-shifting measurement. Four interferograms with pi/2 phase shift are captured at each wavelength for phase measurement, the 2 pi ambiguities are removed by using two or three wavelengths. (C) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
Keywords:
PHASE-SHIFTING INTERFEROMETRY
SCANNING INTERFEROMETRY
PROFILE MEASUREMENT
DIGITAL HOLOGRAPHY
WAVELET TRANSFORM
CAMERA
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