.png){kind=icon}
.png){kind=icon}
Return
Special Focus on Advanced Microelectronics Technology
.png){kind=icon}
OA
AI
DOI：10.1007/s11432-016-5564-2.png)
.png){kind=icon}
.png){kind=icon}
Share.png){kind=icon}
Save
Abstract
En
AI Summary
Key information extracted from the uploaded paper, including a brief overview, abstract, background, key highlights, visual analysis, and future outlook.
Journal
IF:
7.6
Papers:
4.9K
Citations:
8.9K
Organization
View more organizations