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Stable TiOx submicrometer channels
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DOI：10.1149/1.1524614.png)
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Abstract
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The fabrication of submicrometer, stable channels of radio-frequency sputtered metallic titanium and titanium oxide films with different stoichiometries is described in this work. The structure was obtained by coating the films on structures previously holographically recorded in photoresists on glass substrates, and subsequently dissolving the photoresist. Stable channel structures were obtained for all compositions of the TiOx films. For very thin films (10 nm thick) the structures recorded on TiO2 presented less stability. (C) 2002 The Electrochemical Society.
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