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Structured doping with light forces

delete2001-03-19
delete25
PRE
AI
T
Th. Schulze
T
T. Müther
D
Dirk Jürgens
B
B. Brezger
M
Markus K. Oberthaler *
T
Tilman Pfau
J
J. Mlynek
DOI:10.1063/1.1355664delete
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Abstract

Abstract

En 中文
Light forces are a powerful tool for neutral atom manipulation and have been used previously to focus an atomic beam onto a substrate to create periodic nanostructures. We utilize the material-selective characteristic of the atom-light interaction to structure the material composition of a film during growth. A host and a dopant material are evaporated simultaneously, but only the dopant is focused by the light field. The dopant concentration varies laterally on a sub-100-nm-length scale. This technique can be extended to three-dimensional patterning and opens up ways to engineer the photonic, electronic, or magnetic features of a solid. (C) 2001 American Institute of Physics.
Keywords:
FOCUSED ATOMIC DEPOSITION
NEUTRAL ATOMS
LITHOGRAPHY
MASKS
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Journal

Applied Physics Letters cover
Applied Physics Letters
IF:
3.6
Papers:
10.4W
Citations:
17.8W

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No organization information available