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Structured doping with light forces
DOI:10.1063/1.1355664.png)
Abstract
En 中文
Light forces are a powerful tool for neutral atom manipulation and have been used previously to focus an atomic beam onto a substrate to create periodic nanostructures. We utilize the material-selective characteristic of the atom-light interaction to structure the material composition of a film during growth. A host and a dopant material are evaporated simultaneously, but only the dopant is focused by the light field. The dopant concentration varies laterally on a sub-100-nm-length scale. This technique can be extended to three-dimensional patterning and opens up ways to engineer the photonic, electronic, or magnetic features of a solid. (C) 2001 American Institute of Physics.
Keywords:
FOCUSED ATOMIC DEPOSITION
NEUTRAL ATOMS
LITHOGRAPHY
MASKS
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3.6
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17.8W
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