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SU-8 micro coriolis mass flow sensor
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DOI：10.1016/j.snb.2016.10.133.png)
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Abstract
En 中文
This work presents the modelling, design, fabrication and test of the first micro Coriolis mass flow sensor fully fabricated in SU-8 by photolithography processes. The sensor consists of a channel with rectangular cross-section with inner opening of 100 mu m x 100 mu m and is actuated at resonance by Lorentz forces. Metal tracks for the actuation current are deposited on top of the chip. The chip has been tested over a flow range of 0-800 mg/min in the case of water and 0-650 mg/min for isopropyl alcohol (IPA) to confirm that the sensor measures true mass flow (at the maximum flow of the tested range, 0-800 mu l/min for both water and IPA, it results in a pressure drop of 0.98 bar for water and 1.97 bar for IPA). (C) 2016 Elsevier B.V. All rights reserved.
Keywords:
Flow sensor
Coriolis
Microfluidics
SU-8
MEMS
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