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Tailoring IGZO Composition for Enhanced Fully Solution-Based Thin Film Transistors
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DOI：10.3390/nano9091273.png)
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Abstract
En 中文
Solution-processed metal oxides have been investigated as an alternative to vacuum-based oxides to implement low-cost, high-performance electronic devices on flexible transparent substrates. However, their electrical properties need to be enhanced to apply at industrial scale. Amorphous indium-gallium-zinc oxide (a-IGZO) is the most-used transparent semiconductor metal oxide as an active channel layer in thin-film transistors (TFTs), due to its superior electrical properties. The present work evaluates the influence of composition, thickness and ageing on the electrical properties of solution a-IGZO TFTs, using solution combustion synthesis method, with urea as fuel. After optimizing the semiconductor properties, low-voltage TFTs were obtained by implementing a back-surface passivated 3-layer In:Ga:Zn 3:1:1 with a solution-processed high-k dielectric; AlOx. The devices show saturation mobility of 3.2 cm(2) V-1 s(-1), I-On/I-Off of 10(6), SS of 73 mV dec(-1) and V-On of 0.18 V, thus demonstrating promising features for low-cost circuit applications.
Keywords:
IGZO composition
solution combustion synthesis
transparent amorphous semiconductor oxides
low voltage operation
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