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Three-fold superstructured superlattice HfN/HfAlN thin films for improved damage tolerance
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DOI：10.1016/j.matdes.2025.115383.png)
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Abstract
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• Single crystal 3-fold superstructured superlattices of HfN1.33 / Hf0.76Al0.24N1.15. • Strain, mosaicity and superlattice quality determined by reciprocal space maps. • Structural analysis by aberration corrected high-resolution HAADF STEM. • Micropillar compression reveal crack fragmentation on {1 1 0} <1 1 0> slip systems. • Uniformly high strength of ∼7 GPa, hardness of ∼36 GPa and improved toughness.
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