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Topography details restoration method for coherence scanning interferometry based on the spatial frequency response
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DOI：10.1016/j.optlaseng.2026.109849.png)
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Abstract
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Coherence scanning interferometry (CSI) with low-magnification objectives enables large field-of-view measurements with high axial resolution, but suffers from limited lateral resolution, leading to the loss of critical mid-spatial-frequency topography details. This paper proposes a spatial frequency response (SFR) based topography details restoration method for CSI in the frequency domain. The SFR is calculated from the calibrated three-dimensional transfer function and the corresponding imaging model. A frequency-dependent compensation factor derived from the SFR is then applied to the measured spectrum to recover the attenuated components. A noise reference surface is introduced to moderate the compensation at frequencies where the measured signal approaches the noise background, thereby preventing noise-driven artefacts. Simulations and experiments on a self-developed CSI system show improved agreement of compensated 20 × results with measurements from higher resolution reference instruments within the effective band, while maintaining stable behavior at higher frequencies.
Keywords:
Coherence scanning interferometry
Spatial frequency response
Topography details restoration
Frequency domain compensation
Noise reference surface
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