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TSV Electromigration Failure Prediction Using Multiphysics Coupled Energy Method
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DOI：10.1016/j.ijmecsci.2025.110758.png)
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Abstract
En 中文
• A novel energy model links Gibbs energy to EM-induced void nucleation in TSVs. • Predictions have an error margin within ±11.25 units compared to experimental data. • Joule heating and stress augment EM failure time prediction accuracy by 80%. • Multinucleation from heterogeneity drives electrical resistance related failure.
Keywords:
Gibbs energy
electromigration
void nucleation
time-to-failure prediction
Joule heating
electrical resistance
heterogeneous nucleation
Journal
IF:
9.4
Papers:
1.0W
Citations:
4.5W