.png){kind=icon}
.png){kind=icon}
Return
Tunable mechanical coupling between driven microelectromechanical resonators
.png){kind=icon}
OA
AI
DOI：10.1063/1.4964122.png)
.png){kind=icon}
.png){kind=icon}
Share.png){kind=icon}
Save
Abstract
En 中文
We present a microelectromechanical system, in which a silicon beam is attached to a comb-drive actuator, which is used to tune the tension in the silicon beam and thus its resonance frequency. By measuring the resonance frequencies of the system, we show that the comb-drive actuator and the silicon beam behave as two strongly coupled resonators. Interestingly, the effective coupling rate (similar to 1.5 MHz) is tunable with the comb-drive actuator (+10%) as well as with a side-gate (-10%) placed close to the silicon beam. In contrast, the effective spring constant of the system is insensitive to either of them and changes only by +/- 0.5%. Finally, we show that the comb-drive actuator can be used to switch between different coupling rates with a frequency of at least 10 kHz. Published by AIP Publishing.
Keywords:
COMB-DRIVE
ELECTROMECHANICAL OSCILLATOR
NANOMECHANICAL SYSTEMS
BANDPASS-FILTERS
BISTABLE MEMS
ACTUATION
AI Summary
Key information extracted from the uploaded paper, including a brief overview, abstract, background, key highlights, visual analysis, and future outlook.
Journal
IF:
3.6
Papers:
10.4W
Citations:
17.8W
View more organizations